Micro Fabrication Laboratory
The Micro Fabrication Laboratory is a Class 1000 clean room facility capable of thin film processing. Established in 2013 within the Interdisciplinary Research Building, it became a part of the core facilities of Academia Sinica in 2024. Inside the Micro Fabrication Lab, there is various equipment for coating metals and oxides, as well as for fabricating micro/nano structures. The Facility assists researchers in the development of optoelectronic devices, quantum components, sensors and microfluidics, and other devices.
Location:Room B2C03, 6F, Interdisciplinary Research Building for Science and Technology
Manager: Dr. Shu-Yi Hsieh, Assistant Research Scientist, Research Center of Applied Sciences
Contact Person:Ms. Chia-Chu Kuo
Phone Numbers:(02)2787-3140
Website:https://www.rcas.sinica.edu.tw/web/fac_MFL_en.html
Availability:Services are available to colleagues within Academia Sinica as well as those from external academic institutions.
Services:Micro-nano device thin film fabrication
Equipment:
- E Beam Evaporator for Metal
- E Beam Evaporator for Oxide
- Thermal Evaporator
- RF/DC Sputter
- DC Sputter
- Inductively Coupled Plasma-Reactive Ion Etch (ICP-RIE)
- Mask Aligner
- Direct Writer